Lam Research TCP 9400 SE

Models in this family

1. 

   TCP 9400 SE

   The Lam Research TCP 9400 SE is an inductively coupled plasma etch system used for polysilicon/polycide etch and shallow trench isolation.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   9400 SE (Model 9408)	—	1996	Model 9408 variant with serial number 4055, vintage 1996, Envision software version 1.4.	photonicmicrodevices.com[1]
   TCP 9400 SE (150 mm configuration)	—	—	Machine configured for 150 mm wafers, with Edwards 1303 turbo pump, 8-gas orbital gas box, RFG 1250 Halo and RFDS generators.	wotol.com[2]

Sources