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Tool family

Leybold IBS 1400 HT GT Dual Ion Beam

Leybold IBS 1400 HT GT Dual Ion Beam Sputtering System.

Models in this family

  1. The Leybold IBS 1400 HT GT is a dual ion beam sputtering system with a 4-position target tower, KRI sputter and assist sources, an optical monitor, a planetary substrate carrier, test glasses, a ceramic plate substrate heater, and front and rear doors.