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Leybold

IBS 1400 HT GT Dual Ion Beam

DepositionLeybold IBS 1400 HT GT Dual Ion Beam family
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IBS 1400 HT GT Dual Ion Beam — Inventory photo
Fig. 01IBS 1400 HT GT Dual Ion BeamInventory photo[1]

What is it?

The Leybold IBS 1400 HT GT is a dual ion beam sputtering system with a 4-position target tower, KRI sputter and assist sources, an optical monitor, a planetary substrate carrier, test glasses, a ceramic plate substrate heater, and front and rear doors.

What do the numbers mean?

Wafer handling3

4 x 35 0mm planetary substrate carrier (2 x 530 mm planets can also be installed)[1]
Accurate?
Two test glasses (with shutter) on the substrate carrier for complex process monitoring schemes[1]
Accurate?
Ceramic plate substrate heater[1]
Accurate?

Optics & imaging1

OMS5100i direct optical monitor (as installed in the HELIOS)[1]
Accurate?

Configuration & options3

4 position target tower with 3 target positions (optional 4th target)[1]
Accurate?
Main KRI sputter source and additional KRI assist source[1]
Accurate?
Front and rear doors[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the IBS 1400 HT GT Dual Ion Beam are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IBS 1400 HT GT Dual Ion Beam are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the IBS 1400 HT GT Dual Ion Beam are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the IBS 1400 HT GT Dual Ion Beam are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the IBS 1400 HT GT Dual Ion Beam are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the IBS 1400 HT GT Dual Ion Beam is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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