Waferpedia

Tool family

Leybold Syrus

Leybold3 entries

Models in this family

  1. The Leybold Syrus Pro 1510 is an evaporator described as a dual APS planetary system used with standard dielectric materials.

  2. The Leybold Syrus Pro 710 Vacuum Coater is a vacuum coater with a 700 mm chamber inner diameter and a SYRUSpro control system.

All entries

  1. Syrus Pro 1110 BoxLeybold
    2 specs
  2. Syrus Pro 1510Leybold

    The Leybold Syrus Pro 1510 is an evaporator described as a dual APS planetary system used with standard dielectric materials.

    CategoryDeposition
    2 specs
  3. Syrus Pro 710 VacuumLeybold

    The Leybold Syrus Pro 710 Vacuum Coater is a vacuum coater with a 700 mm chamber inner diameter and a SYRUSpro control system.

    CategoryDeposition
    20 specs