Waferpedia

Tool family

Mattson 8800

MattsonThermal / Diffusion1 entry

Mattson 8800 is a third-generation RTP tool developed for 0.25-micron process requirements and described as a 200 mm single-wafer RTP tool.

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Models in this family

  1. 8800introduced 1997third-generation

    Mattson 8800 is a third-generation RTP tool developed for 0.25-micron process requirements and described as a 200 mm single-wafer RTP tool.