Mattson
8800
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- TiSi2/TiN
- CoSi2
- BPSG flow/densification
- Gate oxide anneal and nitridation (NO, N2O, NH3)
- Low temperature copper anneal
- PZT anneals
- High k dielectric anneal in N2O
What do the numbers mean?
Wafer handling5
- Ceramic Shield option
- Backside emissivity independence and better wafer-to-wafer repeatability[1]
Gas & chemistry1
Performance5
- Standard slip-free ring package
- High temperature slip-free processing and improved uniformity[1]
Configuration & options4
Vintage & configurations
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- High process purge gas flowFast chamber purging for high-throughput configuration[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 8800 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the 8800 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 8800 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 8800 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No publicly documented compatible parts, consumables, or accessories for the 8800 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 8800 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
Last updated Jul 29, 2026.
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