Waferpedia

Tool family

Mattson Steag

MattsonThermal / Diffusion2 entries
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Models in this family

  1. Steag / AST 2800 RTP

    The Mattson / Steag / AST 2800 RTP System is a Rapid Thermal Process system.

  2. Steag / AST Heatpulse 610 RTP

All entries

  1. Steag / AST 2800 RTPMattson

    The Mattson / Steag / AST 2800 RTP System is a Rapid Thermal Process system.

    CategoryThermal / Diffusion
    5 specs
  2. Steag / AST Heatpulse 610 RTPMattson
    CategoryThermal / Diffusion
    1 spec