Waferpedia

Mattson

Steag / AST 2800 RTP

Thermal / DiffusionMattson Steag family
Research Quality: 40% complete
Steag / AST 2800 RTP — Inventory photo
Fig. 01Steag / AST 2800 RTPInventory photo[1]

What it is

The Mattson / Steag / AST 2800 RTP System is a rapid thermal process system. The available descriptions identify it by make as Mattson / Steag / AST and by model as 2800.[1][3][2][4][5]

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Missing parts

What do the numbers mean?

Power & electrical4

Phase
3 Phase[3]
Accurate?
Frequency
50 Hz[3]
Accurate?
Voltage
208V[3]
Accurate?
Voltage
400V[2]
Accurate?

Configuration & options1

Missing parts[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Phase3 Phase[3]
  • Frequency50 Hz[3]
  • Voltage208V[3]
  • Voltage400V[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Steag / AST 2800 RTP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Steag / AST 2800 RTP are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Steag / AST 2800 RTP are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Steag / AST 2800 RTP are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the Steag / AST 2800 RTP is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Steag / AST 2800 RTP are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]inventory listing
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing
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Last updated Jul 29, 2026.

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