Tool family
The Optorun OTFC 1300 CBI is a thin film coater with center driving, a substrate dome size of φ1130 mm, EBsourcex2, a substrate heater with 350°C max, and a 60-point optical thickness monitor.
The Optorun OTFC 1300 is a thin film coater with an optical monitor system, quartz crystal film thickness and deposition rate monitor, electron beam and power supply, RF ion beam source, and Polycold.
The Optorun OTFC 1300 CBI is a thin film coater with center driving, a substrate dome size of φ1130 mm, EBsourcex2, a substrate heater with 350°C max, and a 60-point optical thickness monitor.
The Optorun OTFC 1300 is a thin film coater with an optical monitor system, quartz crystal film thickness and deposition rate monitor, electron beam and power supply, RF ion beam source, and Polycold.