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OTFC 1300 CBI Thin Film

Precision OpticsOptorun OTFC 1300 family
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The Optorun OTFC 1300 CBI Thin Film is a thin film coater. The Optorun OTFC 1300 CBI Thin Film uses center driving and a substrate dome size of φ1130 mm. The Optorun OTFC 1300 CBI Thin Film has EBsourcex2, a substrate heater with 350°C max, and a 60-point optical thickness monitor.[1][2]

OptorunOTFC 1300 CBI Thin Film
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What it is

The Optorun OTFC 1300 CBI Thin Film is a thin film coater. The Optorun OTFC 1300 CBI Thin Film is categorized under precision optics. The Optorun OTFC 1300 CBI Thin Film uses center driving. The Optorun OTFC 1300 CBI Thin Film has a substrate dome size of φ1130 mm. The Optorun OTFC 1300 CBI Thin Film has EBsourcex2. The Optorun OTFC 1300 CBI Thin Film has a substrate heater with 350°C maximum temperature. The Optorun OTFC 1300 CBI Thin Film has a 60-point optical thickness monitor.[1][2]

How it works

The Optorun OTFC 1300 CBI Thin Film uses center driving. The Optorun OTFC 1300 CBI Thin Film has two electron beam sources. The Optorun OTFC 1300 CBI Thin Film includes a 60-point optical thickness monitor. The Optorun OTFC 1300 CBI Thin Film includes a substrate heater rated to 350°C maximum.[1][2]

Where it fits in the process flow

General reference — not yet source-verified

Thin film coating tools are used after substrate cleaning and preparation, when the surface is ready to receive an optical or functional layer. Thin film coating tools are used before downstream inspection, measurement, and any later assembly or integration steps. In optics manufacturing, such tools fit into the stage where the substrate must receive a controlled deposited film to achieve its intended transmission, reflection, filtering, or protection behavior.

Applications

General reference — not yet source-verified

Thin film coaters are used to form optical coatings on components such as lenses, mirrors, filters, windows, and related substrates. Thin film coaters are used where deposited layers must modify reflection, transmission, spectral selection, or surface protection. Electron beam evaporation coaters are commonly used for materials and layer stacks chosen for optical performance and environmental durability.

What do the numbers mean?

Wafer handling4

Center driving Substrate dome size φ1130mm[1]
Accurate?
Substrate heater 350℃ max[1]
Accurate?
Substrate dome size
φ1130 mm[1]
Accurate?
Substrate heater
350°C max[1]
Accurate?

Optics & imaging4

60-point optical thickness monitor[1]
Accurate?
Category
Precision Optics[2]
Accurate?
Electron beam sources
EBsourcex2[1]
Accurate?
Optical thickness monitor
60-point[1]
Accurate?

Configuration & options3

EBsourcex2[1]
Accurate?
Drive configuration
Center driving[1]
Accurate?
Tool type
Thin film coater[2]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the substrate dome size?

The substrate dome size is φ1130 mm.[1][2]

How many electron beam sources does the system have?

The system has two electron beam sources (EBsourcex2).[1][2]

How many points does the optical thickness monitor have?

The optical thickness monitor has 60 points.[1][2]

Not publicly documented

The following facts about the OTFC 1300 CBI Thin Film are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the OTFC 1300 CBI Thin Film are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the OTFC 1300 CBI Thin Film are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the OTFC 1300 CBI Thin Film are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the OTFC 1300 CBI Thin Film are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the OTFC 1300 CBI Thin Film is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 19, 2026.

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