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Tool family

Oxford Instruments 80-etch

Oxford InstrumentsEtch1 entry

Oxford Plasmalab 80 is a cleanroom etching and deposition tool used for PECVD and dry etch processes.

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Models in this family

  1. 80-etch

    Oxford Plasmalab 80 is a cleanroom etching and deposition tool used for PECVD and dry etch processes.