Tool family
Oxford Instruments Ionfab 300
Models in this family
The Oxford Instruments Ionfab 300 Plus is an ion beam etching and deposition system with SIMS endpoint detection, reported with wafer handling options from small samples to 8-inch wafers.
Oxford Ionfab 300 Plus IBD is an ion beam deposition system.
Oxford Instruments Ionfab 300 Plus IBD / IBE Tool is an ion beam deposition and ion beam etching system for 6-inch to 8-inch wafers.
All entries
- Ionfab 300 PlusOxford Instruments
The Oxford Instruments Ionfab 300 Plus is an ion beam etching and deposition system with SIMS endpoint detection, reported with wafer handling options from small samples to 8-inch wafers.
CategoryMetrology & Inspection13 specs - Ionfab 300 Plus IBDOxford Instruments
Oxford Ionfab 300 Plus IBD is an ion beam deposition system.
CategoryDeposition2 specs - Ionfab 300 Plus IBD IBEOxford Instruments
Oxford Instruments Ionfab 300 Plus IBD / IBE Tool is an ion beam deposition and ion beam etching system for 6-inch to 8-inch wafers.
CategoryEtch4 specs