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Oxford Instruments

Ionfab 300 Plus IBD IBE

EtchOxford Instruments Ionfab 300 family
Research Quality: 30% complete
Ionfab 300 Plus IBD IBE — Inventory photo
Fig. 01Ionfab 300 Plus IBD IBEInventory photo[1]

What is it?

Oxford Instruments Ionfab 300 Plus IBD / IBE Tool is an ion beam deposition and ion beam etching system for 6-inch to 8-inch wafers.

What do the numbers mean?

Power & electrical1

Phase
3 Phase[1]
Accurate?

Vacuum & pumping1

Loadlock and robot with secondary pumping, Vacuum can remain inside for higher throughput.[1]
Accurate?

Configuration & options2

Able to add another chamber if necessary[1]
Accurate?
SIMS mass spectrometry[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Phase3 Phase[1]
  • ConfigurationLoadlock and robot with secondary pumping, Vacuum can remain inside for higher throughput.[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Ionfab 300 Plus IBD IBE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Ionfab 300 Plus IBD IBE are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Ionfab 300 Plus IBD IBE are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Ionfab 300 Plus IBD IBE are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Ionfab 300 Plus IBD IBE are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Ionfab 300 Plus IBD IBE is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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