Oxford Instruments
Ionfab 300 Plus IBD IBE
The Oxford Instruments Ionfab 300 Plus IBD IBE is an ion beam deposition and ion beam etching system. The Oxford Instruments Ionfab 300 Plus IBD IBE handles wafers from six inches to eight inches. The Oxford Instruments Ionfab 300 Plus IBD IBE includes SIMS mass spectrometry.[1][2]
What it is
How it works
The Ionfab 300 Plus IBD IBE uses a loadlock and robot with secondary pumping, and the vacuum can remain inside for higher throughput.[1][2]
Where it fits in the process flow
Applications
What do the numbers mean?
Power & electrical2
Vacuum & pumping4
Wafer handling1
Configuration & options8
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Phase3 Phase[1]
- ConfigurationLoadlock and robot with secondary pumping, Vacuum can remain inside for higher throughput.[1]
- Power & electrical3 phase[2]
- Vacuum & pumpingLoadlock and robot with secondary pumping; vacuum can remain inside for higher throughput[2]
- ConfigurationLoadlock and robot with secondary pumping[2]
- Vacuum / throughputVacuum can remain inside for higher throughput[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What process types does the Ionfab 300 Plus IBD IBE support?
The Oxford Instruments Ionfab 300 Plus IBD IBE supports ion beam deposition and ion beam etching.[1][2]
What wafer sizes does the Ionfab 300 Plus IBD IBE handle?
The Oxford Instruments Ionfab 300 Plus IBD IBE handles wafers from 6 inches to 8 inches.[1][2]
Not publicly documented
The following facts about the Ionfab 300 Plus IBD IBE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Ionfab 300 Plus IBD IBE are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Ionfab 300 Plus IBD IBE are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Ionfab 300 Plus IBD IBE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Ionfab 300 Plus IBD IBE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Ionfab 300 Plus IBD IBE is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 19, 2026.
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