Tool family
Oxford Instruments OpAL
Oxford Instruments OpAL ALD.
Models in this family
Oxford Instruments OpAL is an atomic layer deposition system with a single open-loop chamber, heated table and sidewalls, and a downstream RF plasma head.
Tool family
Oxford Instruments OpAL ALD.
Oxford Instruments OpAL is an atomic layer deposition system with a single open-loop chamber, heated table and sidewalls, and a downstream RF plasma head.
