Tool family
Oxford Instruments Plasmalab 800
Models in this family
Oxford Instruments 800 Plus is a PECVD (Plasma-Enhanced Chemical Vapor Deposition) system.
The Oxford Plasmalab 800 Plus is a PECVD (plasma-enhanced chemical vapor deposition) system.
The Oxford Instruments Plasmalab 800 Plus RIE is a reactive ion etching system described with a PC controller, four gas mass flow controllers, and a 460 mm diameter electrode.
All entries
- 800 PlusOxford Instruments
Oxford Instruments 800 Plus is a PECVD (Plasma-Enhanced Chemical Vapor Deposition) system.
CategoryDeposition1 spec - 800 Plus RIEOxford InstrumentsCategoryEtch1 spec
- Plasmalab 800 PlusOxford Instruments
The Oxford Plasmalab 800 Plus is a PECVD (plasma-enhanced chemical vapor deposition) system.
CategoryDeposition4 specs - Plasmalab 800 Plus RIEOxford Instruments
The Oxford Instruments Plasmalab 800 Plus RIE is a reactive ion etching system described with a PC controller, four gas mass flow controllers, and a 460 mm diameter electrode.
CategoryEtch7 specs