Oxford Instruments

Plasmalab 800 Plus RIE

Etch Oxford Instruments Plasmalab 800 family

Research Quality: 30% complete

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Plasmalab 800 Plus RIE — Inventory photo — Fig. 01Plasmalab 800 Plus RIEInventory photo^[1]

Power

Advanced Energy RFX 600A RF supply^[1]

Vacuum

Leybold TMP-361C turbopump^[1]

What is it?

The Oxford Instruments Plasmalab 800 Plus RIE is a reactive ion etching system described with a PC controller, four gas mass flow controllers, and a 460 mm diameter electrode.

What do the numbers mean?

Power & electrical1

Advanced Energy RFX 600A RF supply^[1]

Accurate?

Vacuum & pumping3

Leybold Harris Turbotronik NT20 turbopump controller^[1]

Accurate?

Leybold TMP-361C turbopump^[1]

Accurate?

Busch Cobra BA100 vacuum pump^[1]

Accurate?

Control & software1

Advanced Energy TCM tuner controller^[1]

Accurate?

Configuration & options2

LEP Tungsten^[1]

Accurate?

Elkay R2-10 recirculating chiller^[1]

Accurate?

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationAdvanced Energy RFX 600A RF supply^[1]
ConfigurationLeybold Harris Turbotronik NT20 turbopump controller^[1]
ConfigurationLeybold TMP-361C turbopump^[1]
ConfigurationBusch Cobra BA100 vacuum pump^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Plasmalab 800 Plus RIE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Plasmalab 800 Plus RIE are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Plasmalab 800 Plus RIE are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Plasmalab 800 Plus RIE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Plasmalab 800 Plus RIE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Plasmalab 800 Plus RIE is not on record.
Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (5)Every fact above is drawn from these public sources

[1]Inventory photo
[2]Inventory photo
[3]Inventory photo
[4]Oxford Plasmalab 800 RIE Reactive Ion Etch System | SemiStar — semistarcorp.comsemistarcorp.com
[5]Oxford Instruments Plasmalab 800 Plus RIE Reactive Ion Etching System - SemiStar Corp. | SemiStar — semistarcorp.comsemistarcorp.com