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Tool family

Oxford Instruments Plasmalab-80plus-Cloey-S

Oxford InstrumentsEtch1 entry

The PlasmaLab M80 Plus – Chlorine is an open load reactive ion etch system for etching compound semiconductors and metals.

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Models in this family

  1. Plasmalab-80plus-Cloey-S

    The PlasmaLab M80 Plus – Chlorine is an open load reactive ion etch system for etching compound semiconductors and metals.