Oxford Instruments
Plasmalab-80plus-Cloey-S
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- Etching compound semiconductors
- Etching metals
What do the numbers mean?
Power & electrical1
Vacuum & pumping1
Gas & chemistry8
Configuration & options2
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Process gasesBCl3, Cl2, N2, CF4, O2, Ar[1]
- Allowed masksPhotoresist and dielectrics[1]
- Power range< 270 Watts[1]
- MFC flow range - BCl30 – 100 sccm[1]
- MFC flow range - Cl20 – 50 sccm[1]
- MFC flow range - CF40 – 100 sccm[1]
- MFC flow range - O20 – 50 sccm[1]
- MFC flow range - Ar0 – 100 sccm[1]
- MFC flow range - N20 – 100 sccm[1]
- Pressure range< 250 mTorr[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Plasmalab-80plus-Cloey-S are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Plasmalab-80plus-Cloey-S are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Plasmalab-80plus-Cloey-S are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Plasmalab-80plus-Cloey-S are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Plasmalab-80plus-Cloey-S are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Plasmalab-80plus-Cloey-S is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]cores.research.asu.edu — cores.research.asu.educores.research.asu.edu
Last updated Jul 29, 2026.
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