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Tool family

Oxford Instruments PlasmaPro NGP 1000

Oxford InstrumentsDeposition1 entry

Oxford Instruments PlasmaPro NGP 1000 PECVD.

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Models in this family

  1. PlasmaPro NGP 1000

    Oxford Instruments PlasmaPro NGP 1000 is a PECVD system described as capable of running up to 450 mm wafers.