Pfeiffer
Alcatel 2460
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Pfeiffer Alcatel 2460 is a physical vapor deposition sputter system for 6-inch wafers.[2][1]
How it works
Where it fits in the process flow
The Alcatel 2460 is used before downstream steps that depend on a deposited film, and its chamber is returned to production after cleaning.[3]
Applications
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Where does deposition fit in a fabrication sequence?General reference — not yet source-verified
Deposition is usually performed after surface preparation and before later structuring or finishing steps, although it can also be repeated at multiple stages in a multilayer flow.
Why is process control important in deposition?General reference — not yet source-verified
Process control is important because film uniformity, composition, and interface quality depend on stable chamber conditions and consistent material delivery.
Not publicly documented
The following facts about the Alcatel 2460 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alcatel 2460 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Alcatel 2460 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Alcatel 2460 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Alcatel 2460 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Alcatel 2460 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]https://www.foamtecintlwcc.com/wp-content/uploads/2023/02/alcatel-2460-process-chamber.pdf — foamtecintlwcc.comfoamtecintlwcc.com
Last updated Oct 13, 2026.
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