Waferpedia

Pfeiffer

Alcatel 601 E DRIE

EtchPfeiffer Alcatel family
Research Quality: 30% complete
Alcatel 601 E DRIE — Inventory photo
Fig. 01Alcatel 601 E DRIEInventory photo[1]

Power

Advanced Energy RF-F2[1]

Vacuum

VAT Adaptive Pressure Controller[1]

What is it?

The Pfeiffer / Alcatel 601 E DRIE is a Deep Reactive Ion Etch system.

What do the numbers mean?

Power & electrical2

Advanced Energy RF-F2[1]
Accurate?
Advanced Energy RF-20SWC[1]
Accurate?

Vacuum & pumping1

VAT Adaptive Pressure Controller[1]
Accurate?

Configuration & options2

With:[1]
Accurate?
Alcatel ACT 1300 M[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationAdvanced Energy RF-F2[1]
  • ConfigurationAdvanced Energy RF-20SWC[1]
  • ConfigurationVAT Adaptive Pressure Controller[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Alcatel 601 E DRIE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alcatel 601 E DRIE are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Alcatel 601 E DRIE are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Alcatel 601 E DRIE are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Alcatel 601 E DRIE are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Alcatel 601 E DRIE is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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