Waferpedia

Tool family

Plasma-Therm 720/740

Plasma-ThermEtch1 entry

The Plasma Therm 720/740 is a dual-chamber RIE loadlocked system with chlorine- and fluorine-based chemistry.

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Models in this family

  1. 720/740

    The Plasma Therm 720/740 is a dual-chamber RIE loadlocked system with chlorine- and fluorine-based chemistry.