Waferpedia

Tool family

Plasma-Therm RIE790

Plasma-ThermEtch1 entry

PlasmaTherm RIE790 is a reactive ion etch tool listed in the NanoFab dry etch equipment inventory.

LinkedIn X Email

Models in this family

  1. RIE790

    PlasmaTherm RIE790 is a reactive ion etch tool listed in the NanoFab dry etch equipment inventory.