Tool family
Plasma-Therm Unaxis ICP
Plasma-Therm Unaxis ICP Etcher.
Models in this family
Plasma-Therm / Unaxis ICP Etcher is an inductively coupled plasma etcher with wafer auto load/unload and support for 2, 3, 4, 6, and 8 inch wafers.
Tool family
Plasma-Therm Unaxis ICP Etcher.
Plasma-Therm / Unaxis ICP Etcher is an inductively coupled plasma etcher with wafer auto load/unload and support for 2, 3, 4, 6, and 8 inch wafers.
