Plasma-Therm
Unaxis ICP
What is it?
What do the numbers mean?
Power & electrical2
- RF System:[1]
Vacuum & pumping4
Wafer handling2
Gas & chemistry9
- Gas Box:[1]
Control & software2
- Control Valve (VAT):[1]
Configuration & options1
- Chamber:[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationGas Box:[1]
- Gas 1UFC 1660, Cl2, 100 sccm, +/- 3% accuracy[1]
- Gas 2MKS 1479, HBr, 100 sccm, +/- 3% accuracy[1]
- Gas 3MKS 1479, SF6, 100 sccm, +/- 3% accuracy[1]
- Gas 4UFC 8100, BCl3, 100 sccm 3%, +/- 3% accuracy[1]
- Gas 5MKS 1479, O2, 20 sccm 3%, +/- 3% accuracy[1]
- Gas 6MKS 1479, He, 20 sccm 3%, +/-3% accuracy[1]
- Gas 7UFC 1660, Ar, 100 sccm 3%, +/- 3% accuracy[1]
- Gas 8MKS 1479, N2, 20 sccm 3%, +/- 3% accuracy[1]
- ConfigurationRF System:[1]
- GeneratorENI ACG 6 B[1]
- ConfigurationPressure Control:[1]
- ConfigurationMKS 627 Vacuum Gauge[1]
- Pressure Control Range100 mTorr[1]
- Turbo Pump Limit Vacuum5.0 E-6 Torr[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Unaxis ICP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Unaxis ICP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Unaxis ICP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Unaxis ICP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Unaxis ICP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Unaxis ICP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Process Group Internships - UCSB Nanofab Wiki — wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
Last updated Jul 29, 2026.
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