Tool family
The RAITH EBPG5150 is an electron beam lithography system described as a benchmark system for high-throughput, automated, high-precision nanolithography.
The RAITH EBPG5150 is an electron beam lithography system described as a benchmark system for high-throughput, automated, high-precision nanolithography.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| EBPG5150 Plus | — | — | Listed with the same 6-inch laser stage and 155 mm travel range; separate from EBPG5200 Plus, which is listed with an 8-inch laser stage and 210 mm travel range. | web.archive.org[1] |
| EBPG5200 Plus | — | — | Same 8-inch laser stage (210 mm travel range); 40 λ/4096 (0.15 nm) advanced; positional drift < 20 nm / h (open loop). | web.archive.org[1] |