Raith
EBPG5150
What it is
How it works
The EBPG is a direct-write system with automated wafer and multi-sample exposure handling, automated exposure-parameter switching, and automated calibration.[2]
The EBPG uses a robust 100 kV column and supports both a graphical interface and a terminal interface for job preparation, calibration, monitoring, and testing.[2]
Where it fits in the process flow
The EBPG is suited to production environments, industrial research and development, and centers of excellence that require dedicated electron-beam lithography.[2]
What can it run?
Process applications and technology nodes documented for this tool.
- semiconductors
- optoelectronics
- quantum technologies
- quantum sensors
- quantum computing
- quantum communication
- photonic integrated circuits
- laser
- high frequency devices / wireless communication
What do the numbers mean?
Wafer handling1
Optics & imaging10
Performance1
Control & software1
Configuration & options5
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| EBPG5150 Plus | — | — | Listed with the same 6-inch laser stage and 155 mm travel range; separate from EBPG5200 Plus, which is listed with an 8-inch laser stage and 210 mm travel range. | web.archive.org[2] |
| EBPG5200 Plus | — | — | Same 8-inch laser stage (210 mm travel range); 40 λ/4096 (0.15 nm) advanced; positional drift < 20 nm / h (open loop). | web.archive.org[2] |
What replaced it?
Related models
- successorRaith EBPG5000— The EBPG5200 is the latest model in the EBPG series, preceded by the EBPG5150.source[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the EBPG5150 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EBPG5150 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the EBPG5150 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the EBPG5150 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the EBPG5150 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the EBPG5150 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]pnf.uchicago.edupnf.uchicago.edu
- [4]EBPG Archives - RAITH — web.archive.orgweb.archive.org
Last updated Oct 5, 2026.
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