Raith

EBPG5150

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RaithEBPG5150

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What is it?

The sources describe the EBPG line as RAITH's electron beam lithography product family, with the EBPG positioned for production environments, industrial R&D, and centers of excellence. The EBPG5150 variant is listed with a 6-inch laser stage and the line is described with features including automated wafer and multi-sample exposures, high-resolution lithography below 5 nm, and a maximum beam current of 350 nA.

What can it run?

Process applications and technology nodes documented for this tool.

semiconductors
optoelectronics
quantum technologies
quantum sensors
quantum computing
quantum communication
photonic integrated circuits
laser
high frequency devices / wireless communication

What do the numbers mean?

Wafer handling1

exposure capability: Automated wafer and multi-sample exposures^[2]

Optics & imaging8

product family: Electron Beam Lithography^[1]
column technology: Robust 100 kV column technology^[2]
lithography resolution: below 5 nm^[2]
overlay accuracy: ≤ 5 nm^[2]
stitching accuracy: ≤ 8 nm^[2]
stage size: same 6-inch laser stage (155 mm travel range)^[2]
laser interferometer resolution: 10 λ/1024 (0.6 nm) standard^[2]
positional drift: < 25 nm / h^[2]

Performance1

description: Highest throughput, automation, and precision^[2]

Control & software1

control software: Digital RAITH Beams^[2]

Configuration & options3

system line: EBPG^[2]
beam current: up to 350 nA^[2]
thermo-calibration system: standard^[2]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
EBPG5150 Plus	—	—	Listed with the same 6-inch laser stage and 155 mm travel range; separate from EBPG5200 Plus, which is listed with an 8-inch laser stage and 210 mm travel range.	web.archive.org^[2]
EBPG5200 Plus	—	—	Same 8-inch laser stage (210 mm travel range); 40 λ/4096 (0.15 nm) advanced; positional drift < 20 nm / h (open loop).	web.archive.org^[2]

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the EBPG5150 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EBPG5150 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the EBPG5150 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the EBPG5150 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the EBPG5150 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the EBPG5150 are on record.
Answerable by: an OEM parts catalog or a service engineer