Waferpedia

Manufacturer

Raith

Email

Looking for practical guidance on Raith? The reference remains the primary source; requests are private, the network is growing, and a relevant match is not guaranteed.

Request expert help →Share experience privately →

4 entries

  1. EBPG5000Raith
    CategoryLithographyWafer150mmNodesub-10 nm
  2. EBPG5150Raith

    The RAITH EBPG5150 is an electron beam lithography system described as a benchmark system for high-throughput, automated, high-precision nanolithography.

    CategoryLithography
  3. 3DRaith

    Raith eLINE Plus is a multi-technique electron beam lithography and nanoengineering system with an open, upgradable platform and integrated nanomanipulation and focused electron beam induced process capabilities.

    CategoryNanoengineering EBL tool
  4. EBPG5200Raith

    Raith EBPG5200 is a direct write electron beam lithography system with high-kV capability and automation features stated in the product page for the EBPG line.

    CategoryLithographyWafer6"