Waferpedia

Tool family

Raith EBPG5200

RaithLithography1 entry

Raith EBPG5200 is a direct write electron beam lithography system with high-kV capability and automation features stated in the product page for the EBPG line.

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Models in this family

  1. EBPG5200

    Raith EBPG5200 is a direct write electron beam lithography system with high-kV capability and automation features stated in the product page for the EBPG line.

    Cited variants

    DesignationGenerationVintageChangesSource
    EBPG5200+——Described as an electron beam lithography tool capable of high resolution patterning at 100 kV with a 125 MHz pattern generator, 350 nA maximum current, and 1 mm mainfield size.wiki.nano.upenn.edu[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]wiki.nano.upenn.eduwiki.nano.upenn.edu