Waferpedia

Tool family

SPTS APS

SPTSEtch1 entry

SPTS APS is an ICP-based high-density plasma etching system optimized for dielectric etching and single-wafer processing.

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Models in this family

  1. APS

    SPTS APS is an ICP-based high-density plasma etching system optimized for dielectric etching and single-wafer processing.