Waferpedia

Tool family

SPTS MVD300

SPTSDeposition1 entry

The SPTS MVD300 is a Molecular Vapor Deposition system designed for high-performance, flexible, reliable high-volume manufacturing applications.

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Models in this family

  1. MVD300

    The SPTS MVD300 is a Molecular Vapor Deposition system designed for high-performance, flexible, reliable high-volume manufacturing applications.

    Cited variants

    DesignationGenerationVintageChangesSource
    MVD300E——Described as the MVD300E with an EFEM.web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org