SPTS
MVD300
Wafer size
200mm
Gas delivery
Up to 4 precursors[1]
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- MEMS hydrophobic antistiction films
- Sensors
- Actuators
- Displays
- RF switches
- Inkjets
- Data storage devices
- Wettting control in micro-fluidics
- Lab-on-a-chip
- Microplates
- Passivation on implantable devices
- Functionalized surface coatings
- Genome sequencing diagnostics
- Moisture barriers
- Anti-corrosion coatings
- Release layers for imprinting
What do the numbers mean?
Wafer handling2
- Other substrate formats
- Singulated die on tape frames; components on trays; custom substrate fixturing available[1]
Gas & chemistry1
Configuration & options9
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| MVD300E | — | — | Described as the MVD300E with an EFEM. | web.archive.org[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- PrecursorsUp to 4 precursors[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the MVD300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MVD300 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the MVD300 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MVD300 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MVD300 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the MVD300 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
Last updated Jul 29, 2026.
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