Waferpedia

Tool family

SPTS Synapse

SPTSEtch1 entry

The SPTS Synapse is an ICP-based high-density plasma etcher dedicated to etching SiO2 and SixNy layers.

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Models in this family

  1. Synapse

    The SPTS Synapse is an ICP-based high-density plasma etcher dedicated to etching SiO2 and SixNy layers.