SPTS

Synapse

Research Quality: 50% complete

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What is it?

The SPTS Synapse module is described as an ICP-based high-density plasma source optimized for and dedicated to etching SiO2 and SixNy layers. The source also states that it supports single-wafer loadlock/chamber transfers, electrostatic clamping, automated processes, optical-emission and laser reflectometry/interferometry endpoint detection, and specific listed process chemistries.

What can it run?

Process applications and technology nodes documented for this tool.

Etching SiO2 layers
Etching SixNy layers
Single-wafer plasma etching

Why won't it start?

Documented failure modes, common issues, and field considerations.

The etcher must not be exposed to any metallics or traces of metallics.
Wafers that were once in contact with metallic layers, including buried metallic layers, must not be loaded.
Wafers previously processed in SPTS APS etcher are not allowed in SPTS Synapse.

What do the numbers mean?

Wafer handling1

Wafer handling: Loadlock/chamber transfers for single wafer processing^[1]

Gas & chemistry1

Gases available: O2, Ar, He, H2, SF6, C4F8, CF4, CHF3^[1]

Optics & imaging1

Endpoint detection: Optical Emission Spectroscopy (EOS) and laser reflectometry/interferometry^[1]

Configuration & options3

Plasma source: ICP-based high density plasma source^[1]
Dedicated materials: Etching of SiO2 and SixNy layers^[1]
Clamp type: Electrostatic clamping^[1]

Interested in this tool?

Embed spec card

What replaced it?

siblingAlcatel AMS 200 SE— Listed in the same etching equipment section.source^[2]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Gases availableO2, Ar, He, H2, SF6, C4F8, CF4, CHF3^[1]

Where are the manuals?

Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.

Step-by-step usermanualManualepfl.ch

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Synapse are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Synapse are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Synapse are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Synapse are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Synapse is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Synapse are on record.
Answerable by: an OEM parts catalog or a service engineer