Waferpedia

Tool family

Strasbaugh 6 DA

StrasbaughCMP1 entry

Strasbaugh 6 DA Grinder Polisher.

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Models in this family

  1. The Strasbaugh 6 DA is a polisher or grinder/polisher used for semiconductor manufacturing work.

    Cited variants

    DesignationGenerationVintageChangesSource
    6 DA DC——Described as a polisher and noted with 1 phase and 60 Hz.Equipment inventory listing[1]
    6 DA DC 2——Described as a polisher with 2 stations and 220V single-phase power at 18 amp.waferpedia.com[2]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com