Tool family
STS Multiplex
Models in this family
The STS Multiplex ASE ICP Deep Silicon Etcher is a low- and high-frequency ICP etch system for deep silicon trench etching of a single 6-inch substrate.
Tool family
The STS Multiplex ASE ICP Deep Silicon Etcher is a low- and high-frequency ICP etch system for deep silicon trench etching of a single 6-inch substrate.
