STS
Multiplex ASE ICP Deep Silicon
Wafer size
Manual wafer lock
Vacuum
Pumps are not included[1]
What is it?
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Pumps are not included
What do the numbers mean?
Vacuum & pumping1
- Pumps are not included[1]
Wafer handling2
- The system can be used for deep Si trench etching of a single 6" [150mm] substrate[1]
Configuration & options2
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationPumps are not included[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Multiplex ASE ICP Deep Silicon are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Multiplex ASE ICP Deep Silicon are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Multiplex ASE ICP Deep Silicon are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Multiplex ASE ICP Deep Silicon are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Multiplex ASE ICP Deep Silicon is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Multiplex ASE ICP Deep Silicon are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Jul 29, 2026.
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