Waferpedia

Tool family

SUSS MicroTec ACS200

SUSS MicroTecLithography1 entry

The SUSS ACS200 GEN3 is a modular cluster tool for coating and development of i-line photoresists.

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Models in this family

  1. ACS200i-line

    The SUSS ACS200 GEN3 is a modular cluster tool for coating and development of i-line photoresists.