Waferpedia

Tool family

SUSS MicroTec ACS200

SUSS MicroTecLithography1 entry

The SUSS ACS200 GEN3 is a modular cluster tool for coating and development of i-line photoresists.

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Models in this family

  1. ACS200i-line

    The SUSS ACS200 GEN3 is a modular cluster tool for coating and development of i-line photoresists.

    Cited variants

    DesignationGenerationVintageChangesSource
    ACS200 Gen3 TEGen3—Further advanced version of the ACS200 Gen3 with higher throughput, future-ready options, and operation comfort for advanced packaging applications of tomorrow.suss.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]suss.comsuss.com