Waferpedia

Tool family

SUSS MicroTec BA 8

SUSS MicroTecLithography2 entries
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Models in this family

  1. BA 8

    Cited variants

    DesignationGenerationVintageChangesSource
    BA6/BA8———web.archive.org[1]
  2. BA 8 Contact

    The SUSS BA 8 Contact Aligner is a semiconductor lithography aligner with TSA/BSA capability.

All entries

  1. BA 8SUSS MicroTec
    CategoryLithography
    4 specs
  2. BA 8 ContactSUSS MicroTec

    The SUSS BA 8 Contact Aligner is a semiconductor lithography aligner with TSA/BSA capability.

    CategoryLithography
    4 specs

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org