SUSS MicroTec Delta

Models in this family

1. 

   Delta 12 AQ

   The SUSS MicroTec Delta 12 AQ is an automated photoresist developer station that supports temperature controlled spray photoresist development.

2. 

   Delta 80 Spin

   The SUSS Delta 80 Spin is a spin coater/developer with a 3 phase + N + PE, 400 V, 50 Hz power specification and no software included.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Delta 80 RC	—	—	Manual spin coater version with GYRSET closed cover coating technology; described as able to process wafers up to 8 in (200 mm) and substrates up to 6 in x 6 in (150 x 150 mm).	amikon-shop.de[1]

Sources