Waferpedia

Tool family

SUSS MicroTec Delta

SUSS MicroTec2 entries

Models in this family

  1. The SUSS MicroTec Delta 12 AQ is an automated photoresist developer station that supports temperature controlled spray photoresist development.

  2. The SUSS Delta 80 Spin is a spin coater/developer with a 3 phase + N + PE, 400 V, 50 Hz power specification and no software included.

All entries

  1. Delta 12 AQSUSS MicroTec

    The SUSS MicroTec Delta 12 AQ is an automated photoresist developer station that supports temperature controlled spray photoresist development.

    8 specs
  2. Delta 80 SpinSUSS MicroTec

    The SUSS Delta 80 Spin is a spin coater/developer with a 3 phase + N + PE, 400 V, 50 Hz power specification and no software included.

    3 specs