SUSS MicroTec

Delta 80 Spin

Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Delta 80 Spin — Inventory photo — Fig. 01Delta 80 SpinInventory photo^[1]

What is it?

The SUSS Delta 80 Spin is a spin coater/developer with a 3 phase + N + PE, 400 V, 50 Hz power specification and no software included.

What do the numbers mean?

Power & electrical2

Phase: 3 Phase + N + PE^[1]
Voltage: 400 V, 50 Hz^[1]

Control & software1

Software is not included^[1]

Accurate?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Phase3 Phase + N + PE^[1]
Voltage400 V, 50 Hz^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What type of equipment is the SUSS Delta 80?

It is a spin coater and developer.^[1]

What model is identified?

The model is Delta 80.^[1]

Is software included?

Software is not included.^[1]

Not publicly documented

The following facts about the Delta 80 Spin are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Delta 80 Spin are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Delta 80 Spin are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Delta 80 Spin are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Delta 80 Spin are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Delta 80 Spin is not on record.
Answerable by: an OEM datasheet or a fab qualification report