SUSS MicroTec
Delta 80 Spin
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The SUSS MicroTec Delta 80 Spin is a spin coater/developer. The SUSS MicroTec Delta 80 RC uses GYRSET closed cover coating technology. The SUSS MicroTec Delta 80 RC can process wafers up to 8 in (200 mm).[1][2][3]
What it is
The SUSS MicroTec Delta 80 Spin is a spin coater and developer for resist processing.[1]
How it works
Where it fits in the process flow
Applications
What do the numbers mean?
Power & electrical2
Wafer handling3
Gas & chemistry1
Control & software1
- Software is not included[1]
Configuration & options5
- bench-mounted module or standalone operation in stainless steel cabinet[2]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Delta 80 RC | — | — | Manual spin coater version with GYRSET closed cover coating technology; described as able to process wafers up to 8 in (200 mm) and substrates up to 6 in x 6 in (150 x 150 mm). | amikon-shop.de[2] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Delta 80 Spin are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Delta 80 Spin are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Delta 80 Spin are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Delta 80 Spin are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Delta 80 Spin is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Delta 80 Spin are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]amikon-shop.de — amikon-shop.deamikon-shop.de
- [3]SÜSS Microtec Delta 80 RC Spin Coater Rotationsbeschichter | Amikon-Shop.de | An - und Verkauf von gebrauchter Industrieelektonik — amikon-shop.deamikon-shop.de
Last updated Oct 13, 2026.
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