Waferpedia

Tool family

SUSS MicroTec Falcon

SUSS MicroTec2 entries
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Models in this family

  1. Falcon

    The SUSS Falcon is a wafer backside rinse developer system configured for 6-inch to 8-inch wafers.

  2. Falcon ACS 200 Coater Developer Cluster

    The SUSS Falcon ACS 200 is a coater/developer cluster system for wafer processing.

All entries

  1. FalconSUSS MicroTec

    The SUSS Falcon is a wafer backside rinse developer system configured for 6-inch to 8-inch wafers.

    WaferWafer Backside Rinse
    9 specs
  2. Falcon ACS 200 Coater Developer ClusterSUSS MicroTec

    The SUSS Falcon ACS 200 is a coater/developer cluster system for wafer processing.

    5 specs