Waferpedia

Tool family

SUSS MicroTec Falcon

SUSS MicroTec2 entries
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Models in this family

  1. Falcon

    The SUSS Falcon is a wafer backside rinse developer system configured for 6-inch to 8-inch wafers.

  2. Falcon ACS 200 Coater Developer Cluster

    The SUSS Falcon ACS 200 is a coater/developer cluster system for wafer processing.

    Cited variants

    DesignationGenerationVintageChangesSource
    Falcon ACS 200—2000–2000Listed as a coater configuration in one source and a developer configuration in another source.Equipment inventory listing[1]

All entries

  1. FalconSUSS MicroTec

    The SUSS Falcon is a wafer backside rinse developer system configured for 6-inch to 8-inch wafers.

    CategoryResist ProcessingWaferWafer Backside Rinse
    20 specs
  2. Falcon ACS 200 Coater Developer ClusterSUSS MicroTec

    The SUSS Falcon ACS 200 is a coater/developer cluster system for wafer processing.

    CategoryResist Processing
    10 specs

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing