Waferpedia

Tool family

SUSS MicroTec HP 8 Hot Plate

SUSS MicroTec1 entry

Models in this family

  1. The SUSS MicroTec HP 8 Hot Plate is a manual hot plate for R&D work and small-scale production.

    Cited variants

    DesignationGenerationVintageChangesSource
    HP8 TTTable top hot plate for wafer from Ø 2'' up to 200 mm or substrates up to 6'' x 6''; includes 3 lifting pins, temperature range 60 - 250 °C, uniformity +/-0.5 °C up to 120 °C and +/-1 % for 120 °C and above, touchpanel controller, and programmable temperature ramps.equipx.net[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]equipx.netequipx.net