The JEOL JBX-6300FS is an advanced direct-write electron beam lithography system for up to 150mm wafers.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|
| MA6/BA6 | — | — | Configured to do bond aligning in support of the Suss Microtec SB6L Wafer Bonder. | lab.kni.caltech.edu[1] |