SUSS MicroTec
MA6-BA6
The SUSS MicroTec MA6-BA6 is a contact mask aligner for lithography. The SUSS MicroTec MA6-BA6 supports front-side alignment, back-side alignment, and flood exposure. The SUSS MicroTec MA6-BA6 can create structures as small as 500 nm on sample sizes up to 6 inches.[1]
Plate 01Suss MA6/BA6 Mask Aligner (ID# 4923)
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What it is
The SUSS MicroTec MA6-BA6 is a contact mask aligner used for lithography. The MA6-BA6 enables frontside alignment, backside alignment, and flood exposure. The MA6-BA6 creates structures as small as 500 nm on sample sizes up to 6 inches.[1]
Where it fits in the process flow
General reference — not yet source-verifiedMask aligners sit in the photolithography portion of a process flow after substrate preparation and resist coating, and before development, pattern transfer, or lift-off. In typical use, the patterned resist produced by the aligner serves as the temporary stencil for later etch, deposition, implant, or metallization steps.
Applications
The MA6-BA6 supports front side flood exposure without a mask, front side alignment and exposure, and back side alignment with front side exposure. The MA6-BA6 is used for front- and back-side aligned lithography on substrates up to 6 inches.[1]
- direct-write applications
- mask fabrication
What do the numbers mean?
Vacuum & pumping2
Wafer handling2
Optics & imaging7
Configuration & options9
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| MA6/BA6 | — | — | Configured to do bond aligning in support of the Suss Microtec SB6L Wafer Bonder. | lab.kni.caltech.edu[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the MA6-BA6 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MA6-BA6 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the MA6-BA6 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MA6-BA6 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MA6-BA6 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the MA6-BA6 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]lab.kni.caltech.edu — lab.kni.caltech.edulab.kni.caltech.edu
- [2]cnf.cornell.edu — cnf.cornell.educnf.cornell.edu
Last updated Oct 17, 2026.
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