SUSS MicroTec
MA6-BA6
Plate 01Suss MA6/BA6 Mask Aligner (ID# 4923)
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Wafer size
150mm
Optics
sub-10 nm features[1]
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- direct-write applications
- mask fabrication
What do the numbers mean?
Wafer handling1
Optics & imaging2
Configuration & options2
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| MA6/BA6 | — | — | Configured to do bond aligning in support of the Suss Microtec SB6L Wafer Bonder. | lab.kni.caltech.edu[2] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the MA6-BA6 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MA6-BA6 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the MA6-BA6 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MA6-BA6 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MA6-BA6 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the MA6-BA6 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]cnf.cornell.edu — cnf.cornell.educnf.cornell.edu
- [2]lab.kni.caltech.edu — lab.kni.caltech.edulab.kni.caltech.edu
Last updated Jul 29, 2026.
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