Waferpedia

Tool family

SUSS MicroTec MA6/MA4

SUSS MicroTecLithography1 entry

The SUSS MicroTec MA6/MA4 is a UV mask aligner line used to transfer patterns from photomasks onto photoresist-coated substrates.

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Models in this family

  1. MA6/MA4

    The SUSS MicroTec MA6/MA4 is a UV mask aligner line used to transfer patterns from photomasks onto photoresist-coated substrates.

    Cited variants

    DesignationGenerationVintageChangesSource
    MA4——Accommodates wafers up to 4".ece.utoronto.ca[1]
    MA6——Accommodates wafers up to 6".ece.utoronto.ca[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]ece.utoronto.caece.utoronto.ca