SUSS MicroTec

MA6/MA4

Lithography wafers up to 4″ (MA4) or 6″ (MA6); also 1 cm² pieces SUSS MicroTec MA6/MA4 family

Research Quality: 40% complete

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MA6/MA4 — ece.utoronto.ca — Fig. 01MA6/MA4ece.utoronto.ca^[1]

Wafer size

wafers up to 4″ (MA4) or 6″ (MA6); also 1 cm² pieces

Optics

< 1 µm^[1]

What is it?

The MA6 and MA4 Mask Aligners use UV light to transfer patterns from photomasks onto substrates coated with photoresist. The source states exposure resolution of less than 1 µm, topside alignment accuracy of 500 nm, and exposure modes including hard contact, soft contact, proximity, and flood.

What can it run?

Process applications and technology nodes documented for this tool.

Transferring patterns from photomasks onto photoresist-coated substrates

What do the numbers mean?

Wafer handling1

Substrate accommodation: 1 cm² pieces and wafers up to 4″ (MA4) or 6″ (MA6)^[1]

Optics & imaging6

Exposure resolution: < 1 µm^[1]
Alignment accuracy: Topside – 500 nm^[1]
Exposure modes: Hard contact, soft contact, proximity, flood^[1]
Spectral range: 365 nm – 405 nm^[1]
Uniformity: +/- 5% over exposure area^[1]
Image capture: CCD camera and monitor^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
MA4	—	—	Accommodates wafers up to 4".	ece.utoronto.ca^[1]
MA6	—	—	Accommodates wafers up to 6".	ece.utoronto.ca^[1]

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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the MA6/MA4 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MA6/MA4 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the MA6/MA4 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MA6/MA4 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MA6/MA4 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the MA6/MA4 are on record.
Answerable by: an OEM parts catalog or a service engineer