Waferpedia

Tool family

SUSS MicroTec Mask

SUSS MicroTec Mask Cleaner.

Models in this family

  1. SUSS MicroTec Mask is a wet processing and cleanroom class machine used for handling masks and related patterning hardware in semiconductor or precision optics manufacturing. It belongs to the class of equipment that supports mask cleaning, inspection, and preparation before use in downstream lithography or related process steps.