Waferpedia

Tool family

SUSS MicroTec MJB-3

The SUSS MicroTec MJB-3 is listed as a mask aligner for photolithographic patterning and as a contact aligner.

Models in this family

  1. SUSS MicroTec MJB-3 is a lithography machine used for pattern transfer onto a substrate by exposing a light-sensitive resist through a mask. Machines of this class are used for defining fine patterns in research, development, and production environments.