SUSS MicroTec
MJB-3
Plate 01Suss MJB3 350W Mask Aligner (ID 3885)
ClassOneEngineeringWatch on YouTubePlate 02Karl Suss MJB-3 HP/ST Inv# 59511
Bid ServicellcWatch on YouTubePlate 03Karl Suss MJB3 Mask Aligner #60007
Bid ServicellcWatch on YouTubePlate 04Suss MJB3 350W BSA IR Mask Aligner (ID# 3845)
ClassOneEngineeringWatch on YouTubePlate 05Karl Suss MJB3 UV Intensity Measurement and Verification Supplement
Bid ServicellcWatch on YouTubePlate 06MNTL Karl Suss MJB3 Aligner training
cleanroom MNTLWatch on YouTubePlate 07Suss MJB3 Mask Aligner at ClassOne Equipment!
ClassOneVideosWatch on YouTube
What it is
The SUSS MicroTec MJB-3 is a mask aligner used for photolithographic patterning.[1]
How it works
General reference — not yet source-verifiedIn mask alignment lithography, a masked pattern is aligned to the substrate and exposed to light so the resist can be selectively changed. The exposure step is followed by downstream resist processing to leave the desired pattern on the wafer or other substrate.
Where it fits in the process flow
Applications
The MJB-3 is used for photolithographic patterning in device and microstructure fabrication.[1]
- Photolithographic patterning
What do the numbers mean?
Optics & imaging1
Configuration & options4
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of tool is the SUSS MicroTec MJB-3?
It is a mask aligner for photolithographic patterning.[1]
What process is it used for?
It is used for photolithographic patterning in fabrication workflows.[1]
Where does it fit in the tool set?
It is part of the lithography tool set in a nanofabrication environment.[2]
Not publicly documented
The following facts about the MJB-3 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MJB-3 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MJB-3 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MJB-3 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MJB-3 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MJB-3 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]smif.pratt.duke.edu — smif.pratt.duke.edusmif.pratt.duke.edu
- [2]wiki.nanotech.ucsb.edu — wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
- [3]https://smif.pratt.duke.edu/sites/smif.pratt.duke.edu/files/operating/PHOTO1%20operating%20procedure%20rev4.pdf — smif.pratt.duke.edusmif.pratt.duke.edu
Last updated Jul 29, 2026.
